Model
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VSD 1621
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VSD 1821
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VSD 2527
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Dimension
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1600X2100
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1800x2100
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2500x2700
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Material
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SUS304 stainless steel or carbon steel
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Vacuum system
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Rotary pump+Booster pump+Turbo pump (3.0*10-4Pa)
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Working cycle
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50-100minutes/chamber,7m2/chamber
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Process power
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Imported MF power supply
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Cooling system
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POLY cold unit( reaching under 130°C), CHILLER
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Control system
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PLC and one touch screen
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Remark
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All can be designed according to customer's requests.
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