|
Cleanliness grade
|
Maximum particles/m3
|
|
|
|
|
|
FED STD 209E
|
|||||
|
|
≥0.1 μm
|
≥0.2 μm
|
≥0.3 μm
|
≥0.5 μm
|
≥1 μm
|
≥5 μm
|
equivalent
|
|||||
|
ISO 5
|
100,000
|
23,700
|
10,200
|
3,520
|
832
|
def
|
class 100
|
|||||
|
ISO 6
|
1,000,000
|
237,000
|
102,000
|
35,200
|
8,320
|
293
|
class 1,000
|
|||||
|
ISO 7
|
c
|
c
|
c
|
352,000
|
83,200
|
2,930
|
class 10,000
|
|||||
|
ISO 8
|
c
|
c
|
c
|
3,520,000
|
832,000
|
29,300
|
class 100,000
|
|||||
|
ISO 9
|
c
|
c
|
c
|
35,200,222
|
8,320,000
|
293,000
|
room air
|
|||||
