BAORUI Series Parameters
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Model
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IF-12515
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MAIF-1820
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MAIF-2323
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MAT-2345
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MAT1-2368
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Chamber Size(mm)
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D1250×H1500
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D1800×H2000
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D2300×H2300
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D2300-2500*H4500
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D2300-2500*H6800
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Pumping System
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Mechanical Pump +Roots Pump+Diffusion Pump+Maintenance Pump
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Arc
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10
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18
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22
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40-42
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58-62
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Arc Power
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200A
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Bias Power
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30KW--120KW
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Gas
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Ar、N₂、C₂H₂、O₂
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Cooling
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Water cooling circulation,equip with Industrial cooling tower or Industrial water chiller(refrigerating machine)or cryogenic system.(customers provide)
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Vaccum Index
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Extract time (no load cold state):from atmosphere to 9.9×10―³Pa≤10min
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Ultimate Vaccum
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Superior to 5.0×10―⁴Pa
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Pressure Rising
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New machine cold state air leaaking rate≤0.5Pa/h
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Running Power
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According to specific configuration
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Output Frequen
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Custom made
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Occupation
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10
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15
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18
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50
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75
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Accessory
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Oven,Water Tower,Water Pump,Air Compressor,Jig Rack,Water Tank or Pool
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Remark
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All configuration can be custom made
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