Components/Impurities
|
Pure helium/4.0N
|
High purity helium/5.0N
|
Ultrapure Helium/6.0N
|
Helium content
|
99.99%
|
99.999%
|
99.9999%
|
Hydrogen H2
|
≤7.0ppm
|
≤1.0ppm
|
≤0.1ppm
|
Ne
|
≤40ppm
|
≤4.0ppm
|
≤1.0ppm
|
Oxygen O2 + Argon Ar
|
≤5.0ppm
|
≤1.0ppm
|
≤0.1ppm
|
nitrogen N2
|
≤25ppm
|
≤2.0ppm
|
≤0.1ppm
|
carbon monoxide CO
|
≤1.0ppm
|
≤0.5ppm
|
≤0.1ppm
|
carbon dioxide CO2
|
≤1.0ppm
|
≤0.5ppm
|
≤0.1ppm
|
Total Carbon (Methane) THC
|
≤1.0ppm
|
≤0.5ppm
|
≤0.1ppm
|
H2O
|
≤20ppm
|
≤3.0ppm
|
≤0.2ppm
|